We use cookies to ensure that we give you the best experience on our website. You can change your cookie settings at any time. Otherwise, we'll assume you're OK to continue.

Durham University

Department of Engineering

Staff Profile

Publication details for Professor Michael Petty

Jeong, Y., Pearson, C., Lee, Y.U., Winchester, L., Hwang, J., Kim, H., Do, L.-M. & Petty, M.C. (2014). Zinc oxide thin-film transistors fabricated at low temperature by chemical spray pyrolysis. Journal of Electronic Materials 43(11): 4241-4245.

Author(s) from Durham


We report the electrical behavior of undoped zinc oxide thin-film transistors (TFTs) fabricated by low-temperature chemical spray pyrolysis. An aerosol system utilizing aerodynamic focusing was used to deposit the ZnO. Polycrystalline films were subsequently formed by annealing at the relatively low temperature of 140°C. The saturation mobility of the TFTs was 2 cm2/Vs, which is the highest reported for undoped ZnO TFTs manufactured below 150°C. The devices also had an on/off ratio of 104 and a threshold voltage of −3.5 V. These values were found to depend reversibly on measurement conditions.