Publication details for Professor Michael PettyGallant, AJ, Levitt, JA, Swift, GP, Dai, DC, Kaliteevski, M, Wood, D, Petty, MC & Chamberlain, JM (2006), The fabrication of THz photonic filters using ultraviolet based SU8 micromachining, 194-194.
- Publication type: Conference Paper
Author(s) from Durham
Here we report on the development of an ultraviolet (UV) based exposure
technique for the fabrication of high aspect ratio metallic pillar
arrays. These arrays act as photonic band gap based filters. Completed
structures show a relative transmission of up to 97% in the main pass
band centred at 1.25 THz.