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Gallant, A. J. & Wood, D. (2004). The role of fabrication techniques on the performance of widely tunable micromachined capacitors. Sensors and actuators A physical 110(1-3): 423-431.

Publication type: Journal papers: academic
ISSN/ISBN: 0924-4247
DOI: 10.1016/j.sna.2003.07.006
Keywords: RF-MEMS, Varactor, Pull-in, Electroplating, Tuning-range, MEMS.
View online: Online version
Durham research online: DRO record

Author(s) from Durham

Professor David Wood

Abstract

Coventorware 2001.1® is used to identify key vertical dimensions for the low voltage operation of a two-gap widely tunable capacitor. Using identical masking stages, two varieties of tunable capacitor are presented. Nickel structures are demonstrated which have a tuning ratio of 5.1:1 from an initial capacitance of 0.7 pF. Gold devices exhibit a tuning ratio of 7.3:1 from an initial capacitance of 1.5 pF. These are the most widely tunable devices reported to date.

References

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Notes

Selected Papers from Eurosensors XVI Prague, Czech Republic
Prague, Czech Republic, 15 September - 18 September 2002
Edited by P.J. French