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Microsystems Technology Group

Publications 2000

Burdess JS, Harris AJ, Wood D, et al.
The dynamics of a vibrating silicon diaphragm microgyroscope
P I MECH ENG C-J MEC 214 (11): 1379-1388 2000

Lourenco MA, Gardiner DJ, Bowden M, et al.
Stress analysis of B doped silicon bridges and cantilever structures by Raman spectroscopy
J MATER SCI LETT 19 (9): 767-769 MAY 2000

Lourenco MA, Gardiner DJ, Gouvernayre V, et al.
Alleviation of temperature effects in the Raman micro-spectroscopy of boron doped silicon microstructures
J MATER SCI LETT 19 (9): 771-773 MAY 2000