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Microsystems Technology Group

Carbon Nanotube Integrations

The performance, reliability and lifetime of microelectromechanical systems devices and power electronic devices are dependent on the thermal management efficiency and the use of low resistivity interconnects. Carbon nanotubes (CNTs) are also potentially the best known thermal conductors and can potentially achieve ultra low resistivity. As such, they are ideal candidates for efficient thermal management and high performance interconnects. Their integration into IC technology for the development of a new class of devices is a key enabler. We are currently focusing on “low resistivity CNT interconnects” and “CNT interfacial thermal management” for application in RF MEMS and electronic power devices.

 

For further information contact: Dagou Zeze

For more information, please contact:

Professor David Wood, BSc PhD
Chair of Engineering in the  School of Engineering and Computing Sciences
Telephone: +44 (0) 191 33 42464
Room number: E496 (Christopherson)

(email at david.wood@durham.ac.uk)