Group History

Research work into Microsystems Technology at Durham University started in late 1992, in the clean room facilities of the School of Engineering. Besides the work on silicon devices, the group has the capability to manufacture structures from electroplated nickel or from polymers. Currently, research has begun on a number of new and exciting projects which should be beneficial for the local economy as well as being of both scientific and commercial interest.

With many companies unaware of all the potential benefits that Microsystems Technology could bring, a short consultancy contract tailored to the client is an ideal way to assess the likely impact of MST on future business. Durham has a established track record in providing a cost effective service to a tight schedule in MST consultancy.

We work closely with industry to add value to every project. An example is a monolithic sensor to combine the measurements of refractive index and liquid density, which will lead to a unique and world leading product for our collaborator to market in the food and pharmaceutical industries.

A venture to develop a high pressure sensor for off-road vehicles started with two engineers, but was so successful it expanded to eighteen staff in just nine months. At Durham, the device was made and tested, and the complete fabrication process designed to ensure successful mass production in the new environment. Over sixty people are now employed making these sensors at a purpose built facility off campus.

Durham delivers leading edge research on the manufacture of microsytems based devices Notable examples are a silicon gyroscope for automotive applications in both single and 3-axis configurations, a highly tunable capacitor for use in mobile phones, a monolithic probe card for integrated circuit testing and a microbending fibre sensor for pressure and strain measurement.

All our extensively trained postgraduates are in great demand because of the skills that they have acquired while at Durham. In addition, many of our undergraduates use the opportunity provided at Durham to be involved with microsystems in a clean room environment. They become fully trained in all the techniques and are able to make an effective contribution very quickly.

Durham has facilities for design, development, modeling, manufacture and testing of MST structures using silicon, quartz, electroplated metals and polymers. Design and modeling use industry standard software. Fabrication and testing are completed in a new 150 m² clean room suite which offers a unique combination of device manufacture and test with materials deposition.