Profile
Publication details for Professor David Wood
Wood, D & Snowdon, P (2009). The Combination of a Laser Beam Delivered by a Water Jet to Perform Deep Etching in Silicon for MEMS Applications. International Journal of Computational Materials Science and Surface Engineering 2(3/4): 169-185.- Publication type: Journal papers: academic
- ISSN/ISBN: 1753-3465 (print), 1753-3473 (electronic)
- DOI: 10.1504/IJCMSSE.2009.027481
- View online: Online version